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Back End Processing
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Equipment
Equipment
Category
Room
CNC micro milling machine
Back End Processing
1414
Disco Automatic Dicing Saw 3220
Back End Processing
1416
PDMS Clean Space
Back End Processing
1414
QuikLaze-50 ST2
Back End Processing
1435
Thinky Mixer
Back End Processing
1414
Tousimis AutoSamdri 815A
Back End Processing
1420
Tousimis Autosamdri 815B
Back End Processing
1435
UVO Cleaner
Back End Processing
1416
Vapor treatment
Back End Processing
1413
West Bond Ball Bonder
Back End Processing
1416
West Bond Wedge Bonder
Back End Processing
1416
Oxford Plasmalab 100 RIE/ICP
Dry Etching
1439
Oxford Plasmalab 80 RIE
Dry Etching
1439
Technics PEIIB Planar Etcher
Dry Etching
1439
Tepla 100
Dry Etching
1439
Trion RIE/ICP Dry Etcher
Dry Etching
1439
Xactix XeF2 Etcher
Dry Etching
1439
GDSII Editor PC #2
Ebeam Lithography
1416
Raith50 E-beam Writer
Ebeam Lithography
1405 - Cleanroom
Vistec EBPG 5200
Ebeam Lithography
1409
FEI Scios DualBeam FIB/SEM
Materials Characterization
1420
FEI SFEG UHR SEM
Materials Characterization
1420
Horiba XRF Microscope
Materials Characterization
1420
Microfluidics Workstation - Valves controller
Materials Characterization
1414
Phillips XL30 ESEM
Materials Characterization
1420
Veeco Scanning Probe Microscope
Materials Characterization
1420
AJA DC Sputter Deposition Tool
Metalization / Thin Film Deposition
1435
AJA RF Sputter Deposition Tool
Metalization / Thin Film Deposition
1435
Beneq TFS200 Atomic Layer Deposition
Metalization / Thin Film Deposition
1429
Denton 502A Thermal Evaporator
Metalization / Thin Film Deposition
1423
Denton Desk IV Sputter Coater
Metalization / Thin Film Deposition
1405 - Cleanroom
Denton Discovery 18 Sputter System
Metalization / Thin Film Deposition
1425
Denton Discovery 635
Metalization / Thin Film Deposition
1423
Emitech K575X Sputter Coater
Metalization / Thin Film Deposition
1420
Nickel Electroforming System
Metalization / Thin Film Deposition
1435
Oxford Plasmalab PECVD
Metalization / Thin Film Deposition
1429
PDS 2010 Parylene Coater
Metalization / Thin Film Deposition
1423
Temescal BJD 1800 Ebeam Evaporator (1)
Metalization / Thin Film Deposition
1425
Temescal BJD 1800 Ebeam Evaporator (2)
Metalization / Thin Film Deposition
1425
Agilent B1500 Semiconductor Device Analyzer
Metrology
1416
Axio Fluorescence Microscope
Metrology
1420
Dektak 150
Metrology
1419
Filmetrics F20
Metrology
1417
Filmetrics F20 (2)
Metrology
1409
HP 4155 Parametric Analyzer/Probe Station
Metrology
1419
Jandel Four Point Probe with RM3000 Test Unit
Metrology
1419
Keyence VHX1000
Metrology
1414
Rudolph Auto EL Ellipsometer
Metrology
1419
Toho Technology FLX-2320 Thin Film Stress Measurement System
Metrology
1419
Veeco NT1100 Optical Profiling System
Metrology
1419
Zeiss Axio Imager Optical Microscope
Metrology
1409
EVG620 Lithography System
Photolithography
1413
HTG Mask Aligner
Photolithography
1405 - Cleanroom
Karl Suss MA6 Mask Aligner
Photolithography
1413
Karl Suss MJB3 Mask Aligner
Photolithography
1413
AG Associates Heat Pulse 610 (1)
Thermal Processing
1431
AG Associates Heat Pulse 610 (2)
Thermal Processing
1431
Carbolite 301
Thermal Processing
1443
Carver Hot Embossing System
Thermal Processing
1414
Fisher Oven
Thermal Processing
1416
Hot Laminator - GBC Catena 35
Thermal Processing
1405 - Cleanroom
Lindberg Mini-Mite Tube Furnace
Thermal Processing
1416
Ulvac MILA-3000 Minilamp annealer
Thermal Processing
1431
