facilities
Facility User Rates
cleanroom floorplan
personnel
Courses
equipment
Back End Processing
Dry Etching
Ebeam Lithography
Materials Characterization
Metalization / Thin Film Deposition
Metrology
Photolithography
Thermal Processing
all equipment
access
UCSD internal users
non-UCSD external users
Safety
Statement
Evacuation Map
Resources
Services
E-Beam Lithography
Dicing
Microfluidics
Login
username:
password:
Remember me on this computer:
Lost username/ password
Equipment
Name:
HP 4155 Parametric Analyzer/Probe Station
Equipment Type:
Metrology
Description:
Employs four source/monitor units (SMUs), two voltage source units (VSUs) and two voltage measurement units (VMUs) for measuring and analyzing semiconductor device characteristics.
Location
1419
Metrology
Toho Technology FLX-2320 Thin Film Stress Measurement System
HP 4155 Parametric Analyzer/Probe Station
Dektak 150
Veeco NT1100 Optical Profiling System
Rudolph Auto EL Ellipsometer
Jandel Four Point Probe with RM3000 Test Unit