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Equipment
Name:
Rudolph Auto EL Ellipsometer
Equipment Type:
Metrology
Description:
Rudolph Auto EL Ellipsometer measures film thickness or index of refraction for a variety of materials.
Location
1419
Metrology
Toho Technology FLX-2320 Thin Film Stress Measurement System
HP 4155 Parametric Analyzer/Probe Station
Dektak 150
Veeco NT1100 Optical Profiling System
Rudolph Auto EL Ellipsometer
Jandel Four Point Probe with RM3000 Test Unit