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Equipment
Name:
Denton Desk IV Sputter Coater
Equipment Type:
Metalization / Thin Film Deposition
Description:
6” OD Pyrex chamber.
Manual or automatic sputtering time.
Film thickness monitor.
Configured for gold deposition.
Important Information:
System dedicated to sample preparation for e-beam lithography.
Location
1405 - Cleanroom
Training
Denton Desk IV Sputter Coater
HTG Mask Aligner
Raith50 E-beam Writer