facilities
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Back End Processing
Dry Etching
Ebeam Lithography
Materials Characterization
Metalization / Thin Film Deposition
Metrology
Photolithography
Thermal Processing
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E-Beam Lithography
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Microfluidics
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Room 1414 - Microfluidics Lab
Equipment:
Carver Hot Embossing System
CNC micro milling machine
Keyence VHX1000
Microfluidics Workstation - Valves controller
PDMS Clean Space
Thinky Mixer
PDMS Clean Space
