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Room 1439 - Dry Etching
Equipment:
Oxford Plasmalab 100 RIE/ICP
Oxford Plasmalab 80 RIE
Technics PEIIB Planar Etcher
Tepla 100
Trion RIE/ICP Dry Etcher
Xactix XeF2 Etcher
Oxford Plasmalab 100 RIE/ICP
Oxford Plasmalab 80 RIE
Trion RIE/ICP Dry Etcher
Technics PEIIB Planar Etcher
Tepla 100
