|
Service
|
|
Rates
|
|
|
|
(per)
|
UC System*
|
Non-UC System
|
|
Cleanroom Use
|
hr
|
$25
|
$102
|
|
Analytical Lab (Non-Cleanroom) Use
|
hr
|
$15
|
$80
|
|
Raith50 (30kV) Ebeam Lithography Machine Time**
|
hr
|
$50
|
$200
|
| Vistec (100kV) Ebeam Lithography Machine Time*** |
hr
|
$150
|
$300
|
|
SEM (Without Staff Assistance)****
|
hr
|
$25
|
$40
|
|
SEM (With Staff Assistance)****
|
hr
|
$65
|
$95
|
| General Staff Assistance |
hr
|
$59
|
$86
|
|
Training Courses
|
user
|
$300
|
$916
|
*These are cost shared rates for research for UC System users only
**Added to Cleanroom Use charge
*** Total charge for Vistec ebeam lithography service consists of machine time and general staff assistance charges
****Added to Analytical Lab Use charge
Note that all rates are subject to change, pending annual review.